Invention Grant
- Patent Title: Semiconductor device structure and method for manufacturing the same
- Patent Title (中): 半导体器件结构及其制造方法
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Application No.: US13131745Application Date: 2011-02-25
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Publication No.: US08759923B2Publication Date: 2014-06-24
- Inventor: Huicai Zhong , Qingqing Liang
- Applicant: Huicai Zhong , Qingqing Liang
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Troutman Sanders LLP
- Priority: CN201010241036 20100729
- International Application: PCT/CN2011/000308 WO 20110225
- International Announcement: WO2012/013009 WO 20120202
- Main IPC: H01L27/088
- IPC: H01L27/088

Abstract:
The present invention provides a semiconductor device structure and a method for manufacturing the same. The method comprises: providing a semiconductor substrate, forming a first insulating layer on the surface of the semiconductor substrate; forming a shallow trench isolation embedded in the first insulating layer and the semiconductor substrate; forming a stripe-type trench embedded in the first insulating layer and the semiconductor substrate; forming a channel region in the trench; forming a gate stack line on the channel region and source/drain regions on opposite sides of the channel region. Embodiments of the present invention are applicable to manufacture of semiconductor devices.
Public/Granted literature
- US20130113025A1 SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-05-09
Information query
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