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US08759934B2 Backside illuminated image sensor with stressed film 有权
具有应力膜的背面照明图像传感器

Backside illuminated image sensor with stressed film
Abstract:
An image sensor includes a photosensitive region disposed within a semiconductor layer and a stress adjusting layer. The photosensitive region is sensitive to light incident through a first side of the image sensor to collect an image charge. The stress adjusting layer is disposed over the first side of the semiconductor layer to establish a stress characteristic that encourages photo-generated charge carriers to migrate towards the photosensitive region.
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