Invention Grant
- Patent Title: Back-side MOM/MIM devices
- Patent Title (中): 背面MOM / MIM设备
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Application No.: US13430778Application Date: 2012-03-27
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Publication No.: US08759947B2Publication Date: 2014-06-24
- Inventor: Juan Boon Tan , Yeow Kheng Lim , Shao Ning Yuan , Soh Yun Siah , Shunqiang Gong
- Applicant: Juan Boon Tan , Yeow Kheng Lim , Shao Ning Yuan , Soh Yun Siah , Shunqiang Gong
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Ditthavong Mori & Steiner, P.C.
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
Back-side MOM/MIM structures are integrated on a device with front-side circuitry. Embodiments include forming a substrate having a front side and a back side that is opposite the front side, the substrate including circuitry on the front side of the substrate; and forming a metal-oxide-metal (MOM) capacitor, a metal-insulator-metal (MIM) capacitor, or a combination thereof on the back side of the substrate. Other embodiments include forming a through-silicon via (TSV), in the substrate, connecting the MOM capacitor, the MIM capacitor, or a combination thereof to the circuitry on the front side of the substrate.
Public/Granted literature
- US20130256834A1 BACK-SIDE MOM/MIM DEVICES Public/Granted day:2013-10-03
Information query
IPC分类: