Invention Grant
- Patent Title: Electromechanical transducer and method for manufacturing the same which suppresses lowering of sensitivity while a protective layer is formed
- Patent Title (中): 机电换能器及其制造方法，其在形成保护层时抑制灵敏度的降低
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Application No.: US12615070Application Date: 2009-11-09
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Publication No.: US08760031B2Publication Date: 2014-06-24
- Inventor: Chienliu Chang
- Applicant: Chienliu Chang
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2008-295799 20081119
- Main IPC: B06B1/02
- IPC: B06B1/02 ; H04R19/00 ; H04R31/00 ; H02N11/00
Abstract:
An electromechanical transducer of the present invention includes a first electrode, a vibrating membrane formed above the first electrode through a gap, a second electrode formed on the vibrating membrane, and an insulating protective layer formed on a surface of the second electrode side. A region where the protective layer is not formed is present on at least part of a surface of the vibrating membrane.
Public/Granted literature
- US20100123366A1 ELECTROMECHANICAL TRANSDUCER AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2010-05-20
Information query
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