Invention Grant
- Patent Title: Electromechanical transducer and method of producing the same
- Patent Title (中): 机电换能器及其制造方法
-
Application No.: US13436336Application Date: 2012-03-30
-
Publication No.: US08760035B2Publication Date: 2014-06-24
- Inventor: Toshio Tomiyoshi , Kazutoshi Torashima , Takahiro Akiyama
- Applicant: Toshio Tomiyoshi , Kazutoshi Torashima , Takahiro Akiyama
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA, Inc. IP Division
- Priority: JP2011-084673 20110406
- Main IPC: H01L41/047
- IPC: H01L41/047
Abstract:
An electromechanical transducer includes a substrate, a first electrode disposed on the substrate, and a vibration film including a membrane disposed on the first electrode with a space therebetween and a second electrode disposed on the membrane so as to oppose the first electrode. The first electrode has a surface roughness value of 6 nm RMS or less.
Public/Granted literature
- US20120256519A1 ELECTROMECHANICAL TRANSDUCER AND METHOD OF PRODUCING THE SAME Public/Granted day:2012-10-11
Information query
IPC分类:
