Invention Grant
- Patent Title: Coplanar waveguide structures with alternating wide and narrow portions having different thicknesses, method of manufacture and design structure
- Patent Title (中): 具有不同厚度的交替宽窄部分的共面波导结构，制造方法和设计结构
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Application No.: US12959997Application Date: 2010-12-03
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Publication No.: US08760245B2Publication Date: 2014-06-24
- Inventor: Essam Mina , Guoan Wang , Wayne H. Woods, Jr.
- Applicant: Essam Mina , Guoan Wang , Wayne H. Woods, Jr.
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01P3/08
- IPC: H01P3/08 ; H01P9/00
Abstract:
On-chip high performance slow-wave coplanar waveguide structures, method of manufacture and design structures for integrated circuits are provided herein. The structure includes at least one ground and signal layer provided in a same plane as the at least one ground. The signal layer has at least one alternating wide portion and narrow portion with an alternating thickness. The wide portion extends toward the at least one ground.
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