Invention Grant
US08762075B2 Microcantilever-based gas sensor employing two simultaneous physical sensing modes
有权
采用两种同时物理感测模式的基于微型悬臂梁的气体传感器
- Patent Title: Microcantilever-based gas sensor employing two simultaneous physical sensing modes
- Patent Title (中): 采用两种同时物理感测模式的基于微型悬臂梁的气体传感器
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Application No.: US12852416Application Date: 2010-08-06
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Publication No.: US08762075B2Publication Date: 2014-06-24
- Inventor: Albert Loui , Donald J. Sirbuly , Selim Elhadj , Scott K. McCall , Bradley R. Hart , Timothy V. Ratto
- Applicant: Albert Loui , Donald J. Sirbuly , Selim Elhadj , Scott K. McCall , Bradley R. Hart , Timothy V. Ratto
- Applicant Address: US CA Livermore
- Assignee: Lawrence Livermore National Security, LLC
- Current Assignee: Lawrence Livermore National Security, LLC
- Current Assignee Address: US CA Livermore
- Agent Domininc M. Kotab
- Main IPC: G01N31/00
- IPC: G01N31/00

Abstract:
According to one embodiment, a system for detecting and identifying gases includes a piezoresistive microcantilever transducer, wherein dissipation of heat from the piezoresistive microcantilever into one or more gases is measured by changes in an electrical resistance of the piezoresistor, a vibrating microcantilever transducer, wherein shifts are measured in resonant frequency of the vibrating microcantilever due to viscous damping thereof by the one or more gases, and a subsystem for correlating the measured resistance changes and the resonant frequency shifts to the one or more gases. In another embodiment, a method for detecting and identifying one or more gases includes determining dissipation of heat from a microcantilever into one or more gases, and determining shifts in resonant frequency of the microcantilever due to viscous damping thereof by the one or more gases. Other systems, methods, and computer program products are also described according to more embodiments.
Public/Granted literature
- US20110077872A1 MICROCANTILEVER-BASED GAS SENSOR EMPLOYING TWO SIMULTANEOUS PHYSICAL SENSING MODES Public/Granted day:2011-03-31
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