Invention Grant
- Patent Title: Scalable stockers with automatic handling buffer
- Patent Title (中): 具有自动处理缓冲区的可扩展存储器
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Application No.: US13284963Application Date: 2011-10-30
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Publication No.: US08764370B2Publication Date: 2014-07-01
- Inventor: Lutz Rebstock
- Applicant: Lutz Rebstock
- Applicant Address: DE Radolfzell
- Assignee: Dynamic Micro Systems, Semiconductor Equipment GmbH
- Current Assignee: Dynamic Micro Systems, Semiconductor Equipment GmbH
- Current Assignee Address: DE Radolfzell
- Agent Tue Nguyen
- Main IPC: B65G1/00
- IPC: B65G1/00

Abstract:
Scalable storage can be achieved with linear array storage of wafers, comprising two linear arrays of storage compartments on opposite walls, with a middle transfer mechanism. Together with a buffer station for automatic material handling system, a scalable bare wafer stocker can provide flexible and uninterrupted services to a fabrication facility.
Public/Granted literature
- US20120045301A1 Scalable stockers with automatic handling buffer Public/Granted day:2012-02-23
Information query
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