Invention Grant
US08764370B2 Scalable stockers with automatic handling buffer 有权
具有自动处理缓冲区的可扩展存储器

Scalable stockers with automatic handling buffer
Abstract:
Scalable storage can be achieved with linear array storage of wafers, comprising two linear arrays of storage compartments on opposite walls, with a middle transfer mechanism. Together with a buffer station for automatic material handling system, a scalable bare wafer stocker can provide flexible and uninterrupted services to a fabrication facility.
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