Invention Grant
US08764529B2 Arrangement and method to sense flow using mechanical stress microsensors 有权
使用机械应力微传感器检测流动的布置和方法

Arrangement and method to sense flow using mechanical stress microsensors
Abstract:
A sensor module includes a MEMs sensor device and a processing circuit. The MEMs sensor device is operable to determine a fluid flow induced mechanical force on a first flow control device connective element. The processing circuit is operably coupled to receive fluid flow induced mechanical force information based on the determined fluid flow induced mechanical force. The processing circuit is configured to generate a fluid flow measurement value based on the fluid flow induced mechanical force information and position information representative of a position of a flow control device coupled to the first flow control connective element.
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