Invention Grant
US08764681B2 Sharp tip carbon nanotube microneedle devices and their fabrication 有权
尖尖碳纳米管微针装置及其制造

Sharp tip carbon nanotube microneedle devices and their fabrication
Abstract:
Carbon nanotube needles and needle arrays are described in which the precursor pillars are etched by oxygen plasma treatment to provide tapered and/or sharp-tip needles. Processes, products by process, and devices incorporating the sharp-tip needles are further described.
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