Invention Grant
- Patent Title: Apparatus and method for producing single crystals
- Patent Title (中): 单晶制造装置及方法
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Application No.: US12310776Application Date: 2007-08-20
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Publication No.: US08764900B2Publication Date: 2014-07-01
- Inventor: Kiyotaka Takano , Masahiko Urano , Ryoji Hoshi
- Applicant: Kiyotaka Takano , Masahiko Urano , Ryoji Hoshi
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee: Shin-Etsu Handotai Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2006-288360 20061024
- International Application: PCT/JP2007/066094 WO 20070820
- International Announcement: WO2008/050524 WO 20080502
- Main IPC: C30B11/00
- IPC: C30B11/00 ; C30B15/00 ; C30B21/06 ; C30B27/02 ; C30B28/10 ; C30B30/04

Abstract:
The present invention provides an apparatus for producing single crystals according to the Czochralski method, the apparatus including a chamber that can be divided into a plurality of chambers; at least one of the plurality of divided chambers having a circulating coolant passage in which a circulating coolant for cooling the chamber circulates; and measuring means that respectively measure an inlet temperature, an outlet temperature, and a circulating coolant flow rate of the circulating coolant in the circulating coolant passage; the apparatus further including a calculating means that calculates a quantity of heat removed from the chamber and/or a proportion of the quantity of removed heat, from the measured values of the inlet temperature, outlet temperature, and circulating coolant flow rate; and a pulling rate control means that controls a pulling rate of the single crystal based on the resulting quantity of removed heat and/or the resulting proportion of the quantity of removed heat. The invention also provides a method for producing single crystals using the apparatus. Thus, an apparatus and a method for producing single crystals are provided for producing single crystals while easily stabilizing the crystal quality.
Public/Granted literature
- US20090249995A1 Apparatus and method for producing single crystals Public/Granted day:2009-10-08
Information query
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