Invention Grant
- Patent Title: Film-forming apparatus
- Patent Title (中): 成膜装置
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Application No.: US13738278Application Date: 2013-01-10
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Publication No.: US08764902B2Publication Date: 2014-07-01
- Inventor: Yasumasa Suzuki , Kenji Kimura , Kazuya Tsukagoshi , Takashi Kageyama
- Applicant: ULVAC, Inc.
- Applicant Address: JP Chigasaki-shi
- Assignee: ULVAC, Inc.
- Current Assignee: ULVAC, Inc.
- Current Assignee Address: JP Chigasaki-shi
- Agency: Kratz, Quintos & Hanson, LLP
- Priority: JP2010-158079 20100712
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/52 ; H01L21/3205 ; H01L21/36

Abstract:
A film-forming apparatus capable of discharging a feedstock gas and a reactive gas to an inner side of the vacuum chamber by more effectively cooling the gases without mixing them in comparison with the conventional art. A discharge plate having a first face exposed inside the vacuum chamber is provided with a plurality of feedstock gas introduction holes and a plurality of reactive gas introduction holes penetrating the discharge plate. A plurality of grooves having the feedstock gas introduction holes located on the bottom face are formed in the second face opposite to the first face of the discharge plate, a top plate that covers the groove is arranged over the second face, and the feedstock gas through-hole formed in the top plate and the feedstock gas introduction hole are connected to each other with the first auxiliary pipe.
Public/Granted literature
- US20130174783A1 FILM-FORMING APPARATUS Public/Granted day:2013-07-11
Information query
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