Invention Grant
US08764993B2 SiOC membranes and methods of making the same 失效
SiOC膜及其制造方法

SiOC membranes and methods of making the same
Abstract:
A method of making a porous SiOC membrane is provided. The method comprises disposing a SiOC layer on a porous substrate, and etching the SiOC layer to form through pores in the SiOC layer. A porous SiOC membrane having a network of pores extending through a thickness of the membrane is provided.
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