Invention Grant
US08765026B2 Tablet for vapor deposition and method for producing the same 有权
气相沉积用片剂及其制造方法

Tablet for vapor deposition and method for producing the same
Abstract:
A tablet for vapor deposition characterized in that on a fracture surface of an indium oxide sintered body, the percentage of crystal grains having a grain diameter corresponding to a highest peak is 20% or less. The tablet is produced by: mixing indium oxide powder and cerium oxide powder, and subjecting the mixture to a heat treatment at 1300° C. to 1550° C. to calcine; mixing an uncalcined indium oxide powder and/or an uncalcined cerium oxide powder with the obtained calcined powder such that the ratio of the calcined powder is 50% to 80% by mass, followed by granulation; and molding the obtained granulated powder, thereby forming a molded body, and then sintering the molded body at a temperature which is 1100° C. to 1350° C., and which is lower than the temperature of the heat treatment on the calcined powder in the first step by 20° C. or more.
Public/Granted literature
Information query
Patent Agency Ranking
0/0