Invention Grant
- Patent Title: Method to manufacture large uniform ingots of silicon carbide by sublimation/condensation processes
- Patent Title (中): 通过升华/缩合工艺制造大型均匀碳化硅锭的方法
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Application No.: US12744532Application Date: 2008-10-08
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Publication No.: US08765091B2Publication Date: 2014-07-01
- Inventor: Mark Loboda , Seung Ho Park , Victor Torres
- Applicant: Mark Loboda , Seung Ho Park , Victor Torres
- Applicant Address: US MI Midland
- Assignee: Dow Corning Corporation
- Current Assignee: Dow Corning Corporation
- Current Assignee Address: US MI Midland
- Agent Timothy J. Troy
- International Application: PCT/US2008/079126 WO 20081008
- International Announcement: WO2009/075935 WO 20090618
- Main IPC: C01B31/36
- IPC: C01B31/36 ; C01B33/08 ; C01B33/06 ; C01B31/30 ; C01B33/00 ; C30B25/00

Abstract:
This invention relates to a method for the manufacture of monolithic ingot of silicon carbide comprising: i) introducing a mixture comprising polysilicon metal chips and carbon powder into a cylindrical reaction cell having a lid; ii) sealing the cylindrical reaction cell of i); iii) introducing the cylindrical reaction cell of ii) into a vacuum furnace; iv) evacuating the furnace of iii); v) filling the furnace of iv) with a gas mixture which is substantially inert gas to near atmospheric pressure; vi) heating the cylindrical reaction cell in the furnace of v) to a temperature of from 1600 to 2500° C.; vii) reducing the pressure in the cylindrical reaction cell of vi) to less than 50 torr but not less than 0.05 torr; and viii) allowing for substantial sublimation and condensation of the vapors on the inside of the lid of the cylindrical reaction cell of vii).
Public/Granted literature
- US20120114545A1 Method to Manufacture Large Uniform Ingots of Silicon Carbide by Sublimation/Condensation Processes Public/Granted day:2012-05-10
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