Invention Grant
US08765356B2 Calixarene compound and photoresist composition comprising same 有权
杯芳烃化合物和包含其的光致抗蚀剂组合物

Calixarene compound and photoresist composition comprising same
Abstract:
A molecular glass compound includes (A) a tetrameric reaction product of a specific aromatic compound having at least one hydroxy group, and a specific polycyclic or fused polycyclic aromatic aldehyde; and (B) an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound and/or a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde. A photoresist composition including the molecular glass compound, and a coated substrate including a layer of the photoresist composition are also disclosed.
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