Invention Grant
- Patent Title: Calixarene compound and photoresist composition comprising same
- Patent Title (中): 杯芳烃化合物和包含其的光致抗蚀剂组合物
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Application No.: US13624597Application Date: 2012-09-21
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Publication No.: US08765356B2Publication Date: 2014-07-01
- Inventor: D. Patrick Green , Vipul Jain , Brad C. Bailey
- Applicant: Rohm and Haas Electronic Materials LLC
- Applicant Address: US MI Midland US MA Marlborough
- Assignee: Dow Global Technologies LLC,Rohm and Haas Electronics Materials LLC
- Current Assignee: Dow Global Technologies LLC,Rohm and Haas Electronics Materials LLC
- Current Assignee Address: US MI Midland US MA Marlborough
- Agency: Cantor Colburn LLP
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/039 ; C07C41/00

Abstract:
A molecular glass compound includes (A) a tetrameric reaction product of a specific aromatic compound having at least one hydroxy group, and a specific polycyclic or fused polycyclic aromatic aldehyde; and (B) an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound and/or a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde. A photoresist composition including the molecular glass compound, and a coated substrate including a layer of the photoresist composition are also disclosed.
Public/Granted literature
- US20130157195A1 CALIXARENE COMPOUND AND PHOTORESIST COMPOSITION COMPRISING SAME Public/Granted day:2013-06-20
Information query
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