Invention Grant
- Patent Title: Resin and photoresist composition comprising same
- Patent Title (中): 包含其的树脂和光致抗蚀剂组合物
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Application No.: US13447796Application Date: 2012-04-16
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Publication No.: US08765357B2Publication Date: 2014-07-01
- Inventor: Tatsuro Masuyama , Koji Ichikawa
- Applicant: Tatsuro Masuyama , Koji Ichikawa
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2011-092661 20110419
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/039 ; G03F7/30 ; C08F236/20

Abstract:
The present invention provides a resin comprising a structural unit derived from a compound represented by the formula (I): wherein R1 represents a hydrogen atom or a methyl group, A2 represents a divalent fluorine-containing C1-C12 hydrocarbon group, and A1 represents a group represented by the formula (a-g1): A10-X10sA11- (a-g1) wherein A10 is independently in each occurrence a C1-C5 aliphatic hydrocarbon group, A11 represents a C1-C5 aliphatic hydrocarbon group, X10 is independently in each occurrence —O—, —CO—, —CO—O— or —O—CO—, and s represents an integer of 0 to 2, and a photoresist composition comprising the resin and an acid generator.
Public/Granted literature
- US20120270154A1 RESIN AND PHOTORESIST COMPOSITION COMPRISING SAME Public/Granted day:2012-10-25
Information query
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