Invention Grant
US08765358B2 Water-soluble resin composition and method of forming fine patterns by using the same
失效
水溶性树脂组合物及使用其形成精细图案的方法
- Patent Title: Water-soluble resin composition and method of forming fine patterns by using the same
- Patent Title (中): 水溶性树脂组合物及使用其形成精细图案的方法
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Application No.: US13171623Application Date: 2011-06-29
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Publication No.: US08765358B2Publication Date: 2014-07-01
- Inventor: Sang Wook Park , So Jung Park , Dong-Chul Seo
- Applicant: Sang Wook Park , So Jung Park , Dong-Chul Seo
- Applicant Address: KR Seoul
- Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2011-0006334 20110121
- Main IPC: G03F7/40
- IPC: G03F7/40 ; G03F7/30 ; G03F7/20 ; C08F232/04 ; C08F222/38

Abstract:
A water-soluble resin composition for forming fine patterns comprising water-soluble polymer represented by Chemical Formula 1 as below and the first water-soluble solvent, is coated and heated on a photoresist layer having at least one contact hole to reduce a size of the at least one contact hole. (In Chemical Formula 1, each of R1, R2, R3 and R5 independently represents an alkyl group of C1-30 or an cyclo alkyl group of C3-30 which respectively have one selected from the group consisting of hydrogen, an ether group, an ester group, a carbonyl group, an acetal, an epoxy group, a nitril group, an amine group, and an aldehyde group; each of R4, R6, R7 and R8 independently represents hydrogen or a methyl group; n represents an integer of 0 to 5; a represents a real number of 0.05 to 0.5; each of b, c and d respectively represents a real number of 0 to 0.7; and a+b+c+d=1).
Public/Granted literature
- US20120189963A1 WATER-SOLUBLE RESIN COMPOSITION AND METHOD OF FORMING FINE PATTERNS BY USING THE SAME Public/Granted day:2012-07-26
Information query
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