Invention Grant
- Patent Title: Patterning method
- Patent Title (中): 图案化方法
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Application No.: US13720162Application Date: 2012-12-19
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Publication No.: US08765362B2Publication Date: 2014-07-01
- Inventor: Tomoya Oori
- Applicant: Tomoya Oori
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
According to one embodiment, a patterning method includes exposure-transferring a plurality of first island pattern images and a plurality of second island pattern images onto a resist film, each of the plurality of first island pattern images having a configuration having a contour line or a major axis extending in a third direction, the plurality of first island pattern images having a staggered arrangement, each of the plurality of second island pattern images having a configuration having a contour line or a major axis extending in a fourth direction, the plurality of second island pattern images having a staggered arrangement, the first island pattern images and the second island pattern images being continuous in the first direction by a portion of each of the second island pattern images overlapping one of the first island pattern images.
Public/Granted literature
- US20140065556A1 PATTERNING METHOD Public/Granted day:2014-03-06
Information query
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