Invention Grant
- Patent Title: N-channel erasable programmable non-volatile memory
- Patent Title (中): N通道可擦写可编程非易失性存储器
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Application No.: US13366668Application Date: 2012-02-06
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Publication No.: US08765550B2Publication Date: 2014-07-01
- Inventor: Shanjen Pan , Alan T. Mitchell , Jack G. Qian
- Applicant: Shanjen Pan , Alan T. Mitchell , Jack G. Qian
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent John R. Pessetto; Frederick J. Telecky, Jr.
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/788

Abstract:
In an embodiment of the invention, a method of fabricating a floating-gate NMOSFET (n-type metal-oxide semiconductor field-effect transistor) is disclosed. A silicide blocking layer (e.g. oxide, nitride) is used not only to block areas from being silicided but to also form an insulator on top of a poly-silicon gate. The insulator along with a top electrode (control gate) forms a capacitor on top of the poly-silicon gate. The poly-silicon gate also serves as the bottom electrode of the capacitor. The capacitor can then be used to capacitively couple charge to the poly-silicon gate. Because the poly-silicon gate is surrounded by insulating material, the charge coupled to the poly-silicon gate may be stored for a long period of time after a programming operation.
Public/Granted literature
- US20130016570A1 N-Channel Erasable Programmable Non-Volatile Memory Public/Granted day:2013-01-17
Information query
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