Invention Grant
- Patent Title: Replacement gate CMOS
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Application No.: US13427237Application Date: 2012-03-22
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Publication No.: US08765558B2Publication Date: 2014-07-01
- Inventor: Kangguo Cheng , Haining S. Yang
- Applicant: Kangguo Cheng , Haining S. Yang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L21/02
- IPC: H01L21/02

Abstract:
A CMOS structure and a method for fabricating the CMOS structure include within a semiconductor substrate a first gate located over a first active region of a first polarity and a second gate located over a second active region of a second polarity different than the first polarity. The first active region and the second active region are separated by an isolation region. The first gate and the second gate are co-linear, with facing endwalls that terminate over the isolation region. The facing endwalls do not have a spacer located or formed adjacent or adjoining thereto, although sidewalls of the first gate and the second gate do. The CMOS structure may be fabricated using a sequential replacement gate method.
Public/Granted literature
- US20120178227A1 REPLACEMENT GATE CMOS Public/Granted day:2012-07-12
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