Invention Grant
- Patent Title: Methods of forming variable resistive memory devices
- Patent Title (中): 形成可变电阻式存储器件的方法
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Application No.: US13495529Application Date: 2012-06-13
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Publication No.: US08765564B2Publication Date: 2014-07-01
- Inventor: Myung Jin Kang
- Applicant: Myung Jin Kang
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2011-0056992 20110613
- Main IPC: H01L21/20
- IPC: H01L21/20 ; H01L45/00

Abstract:
A method of forming a variable resistive memory device includes forming a conductive pattern that alternates with a first insulation pattern along a first direction on a substrate that is parallel with a surface of the substrate, forming a preliminary sacrificial pattern on the conductive pattern that contacts a sidewall of the first insulation pattern, etching the conductive pattern using the preliminary sacrificial pattern as an etch masks to form a preliminary bottom electrode pattern, patterning the preliminary sacrificial pattern and the preliminary bottom electrode pattern to form a sacrificial pattern and a bottom electrode pattern that each include at least two portions which are separated from each other along a second direction intersecting the first direction, and replacing the sacrificial pattern with a variable resistive pattern.
Public/Granted literature
- US20120315737A1 METHODS OF FORMING VARIABLE RESISTIVE MEMORY DEVICES Public/Granted day:2012-12-13
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