Invention Grant
- Patent Title: Doping of copper wiring structures in back end of line processing
- Patent Title (中): 在线路处理后端掺杂铜线结构
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Application No.: US13599256Application Date: 2012-08-30
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Publication No.: US08765602B2Publication Date: 2014-07-01
- Inventor: Thomas W. Dyer , Daniel C. Edelstein , Tze-man Ko , Andrew H. Simon , Wei-tsu Tseng
- Applicant: Thomas W. Dyer , Daniel C. Edelstein , Tze-man Ko , Andrew H. Simon , Wei-tsu Tseng
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Catherine Ivers
- Main IPC: H01L23/52
- IPC: H01L23/52

Abstract:
A method of forming a metal interconnect structure includes forming a copper line within an interlevel dielectric (ILD) layer; directly doping a top surface of the copper line with a copper alloy material; and forming a dielectric layer over the ILD layer and the copper alloy material; wherein the copper alloy material serves an adhesion interface layer between the copper line and the dielectric layer.
Public/Granted literature
- US20140061914A1 DOPING OF COPPER WIRING STRUCTURES IN BACK END OF LINE PROCESSING Public/Granted day:2014-03-06
Information query
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