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US08765602B2 Doping of copper wiring structures in back end of line processing 有权
在线路处理后端掺杂铜线结构

Doping of copper wiring structures in back end of line processing
Abstract:
A method of forming a metal interconnect structure includes forming a copper line within an interlevel dielectric (ILD) layer; directly doping a top surface of the copper line with a copper alloy material; and forming a dielectric layer over the ILD layer and the copper alloy material; wherein the copper alloy material serves an adhesion interface layer between the copper line and the dielectric layer.
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