Invention Grant
US08766135B2 Glass substrate laser cutting device with real-time breaking detecting function and glass substrate breakage detecting method thereof 有权
具有实时断裂检测功能的玻璃基板激光切割装置及其玻璃基板破损检测方法

Glass substrate laser cutting device with real-time breaking detecting function and glass substrate breakage detecting method thereof
Abstract:
A glass substrate laser cutting device according to the invention includes: a working table that has a plurality of vacuum absorbing grooves; a laser cutter; a pressure sensor that measures a pressure sensor when suctioning the glass substrate in a vacuum state; a calculation processing unit that compares the vacuum pressure measured by the pressure sensor with a predetermined threshold pressure and determines whether the glass substrate is broken; a laser cutter that includes a leaser head moving along the cutting direction of the glass substrate and emitting a laser beam; and an optical sensor that is attached to the laser head so as to move together and is disposed at a point in front of the laser beam emitted to the outside so as to detect the breakage of the glass substrate.
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