Invention Grant
- Patent Title: Production method of microlens
- Patent Title (中): 微透镜的生产方法
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Application No.: US13574897Application Date: 2011-01-20
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Publication No.: US08766158B2Publication Date: 2014-07-01
- Inventor: Shinya Arase , Takahiro Sakaguchi
- Applicant: Shinya Arase , Takahiro Sakaguchi
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2010-012853 20100125
- International Application: PCT/JP2011/050976 WO 20110120
- International Announcement: WO2011/090115 WO 20110728
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01J3/14 ; G03F1/00 ; G02B23/24

Abstract:
A production method of a solid-state imaging device in which microlenses are arranged adjacent to each other on a substrate, includes: a first process of forming first microlenses on a surface of the substrate leaving space therebetween for providing second microlenses; and a second process of applying an overcoating material onto the surface of the substrate on which the first microlenses are formed, drying the overcoating material, exposing the overcoating material to light using a gray scale mask, and developing the exposed overcoating material, so as to form second microlenses in the space between the first microlenses adjacent to each other.
Public/Granted literature
- US20120298842A1 PRODUCTION METHOD OF MICROLENS Public/Granted day:2012-11-29
Information query
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