Invention Grant
US08766164B2 Geiger-mode photodiode with integrated and adjustable quenching resistor and surrounding biasing conductor 有权
Geiger模式光电二极管,集成可调节的淬火电阻和周围的偏置导体

Geiger-mode photodiode with integrated and adjustable quenching resistor and surrounding biasing conductor
Abstract:
An embodiment of a Geiger-mode avalanche photodiode includes a body of semiconductor material having a first conductivity type, a first surface and a second surface; a trench extending through the body from the first surface and surrounding an active region; a lateral-isolation region within the trench, formed by a conductive region and an insulating region of dielectric material, the insulating region surrounding the conductive region; an anode region having a second conductivity type, extending within the active region and facing the first surface. The active region forms a cathode region extending between the anode region and the second surface, and defines a quenching resistor. The photodiode has a contact region of conductive material, overlying the first surface and in contact with the conductive region for connection thereof to a circuit biasing the conductive region, thereby a depletion region is formed in the active region around the insulating region.
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