Invention Grant
- Patent Title: Semiconductor memory devices having variable resistor and methods of fabricating the same
- Patent Title (中): 具有可变电阻器的半导体存储器件及其制造方法
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Application No.: US13221242Application Date: 2011-08-30
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Publication No.: US08766232B2Publication Date: 2014-07-01
- Inventor: Sukhun Choi , Boun Yoon , Kevin Ahn , Doo-Sung Yun
- Applicant: Sukhun Choi , Boun Yoon , Kevin Ahn , Doo-Sung Yun
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2010-0100466 20101014
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L27/24 ; H01L45/00

Abstract:
According to a method of fabricating the semiconductor memory device, a contact plug can be protected while mold openings are formed. A semiconductor memory device may include a mold dielectric layer on an entire surface of a substrate, the substrate including a first region and a second region. A contact plug may be provided in a contact hole formed through the mold dielectric layer in the first region. A variable resistor may be provided in a mold opening formed through the mold dielectric layer in the second region. An upper surface of the contact plug may be at a level equal to or lower than an upper surface of the mold dielectric layer.
Public/Granted literature
- US20120091422A1 Semiconductor Memory Devices Having Variable Resistor And Methods Of Fabricating The Same Public/Granted day:2012-04-19
Information query
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