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US08766264B2 Thin film transistor with concave region in the gate insulating layer thereof 有权
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Thin film transistor with concave region in the gate insulating layer thereof
Abstract:
An embodiment of the disclosed technology provides a thin film transistor device comprising a source electrode, a drain electrode, a gate electrode, an active layer corresponding to the gate electrode, and a gate insulation layer formed between the gate electrode and the active layer; a concave region corresponding to the gate electrode is provided in the gate insulation layer.
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