Invention Grant
US08766318B2 Semiconductor wafer, method of manufacturing a semiconductor wafer, and electronic device
失效
半导体晶片,半导体晶片的制造方法以及电子器件
- Patent Title: Semiconductor wafer, method of manufacturing a semiconductor wafer, and electronic device
- Patent Title (中): 半导体晶片,半导体晶片的制造方法以及电子器件
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Application No.: US12920455Application Date: 2009-02-27
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Publication No.: US08766318B2Publication Date: 2014-07-01
- Inventor: Masahiko Hata , Tomoyuki Takada
- Applicant: Masahiko Hata , Tomoyuki Takada
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2008-051448 20080301
- International Application: PCT/JP2009/000920 WO 20090227
- International Announcement: WO2009/110207 WO 20090911
- Main IPC: H01L29/12
- IPC: H01L29/12

Abstract:
The objective is to improve capabilities such as high-speed switching of a compound semiconductor device. Provided is a semiconductor wafer comprising a silicon wafer; an insulating film that is formed on the silicon wafer and that has an open portion reaching the silicon wafer; a Ge crystal formed in the open portion; a seed compound semiconductor crystal that is grown with the Ge crystal as a nucleus and that protrudes beyond a surface of the insulating film; and a laterally grown compound semiconductor layer that is laterally grown on the insulating film with a specified surface of the seed compound semiconductor crystal as a seed surface.
Public/Granted literature
- US20110006343A1 SEMICONDUCTOR WAFER, METHOD OF MANUFACTURING A SEMICONDUCTOR WAFER, AND ELECTRONIC DEVICE Public/Granted day:2011-01-13
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