Invention Grant
- Patent Title: Area-efficient capacitor using carbon nanotubes
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Application No.: US13690593Application Date: 2012-11-30
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Publication No.: US08766345B2Publication Date: 2014-07-01
- Inventor: Damon B. Farmer , Aaron D. Franklin , Shu-Jen Han , George S. Tulevski
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/76 ; H01L29/94 ; H01L31/119
Abstract:
An on-chip decoupling capacitor is disclosed. One or more carbon nanotubes are coupled to a first electrode of the capacitor. A dielectric skin is formed on the one or more carbon nanotubes. A metal coating is formed on the dielectric skin. The dielectric skin is configured to electrically isolate the one or more carbon nanotubes from the metal coating.
Public/Granted literature
- US20140151847A1 AREA-EFFICIENT CAPACITOR USING CARBON NANOTUBES Public/Granted day:2014-06-05
Information query
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