Invention Grant
- Patent Title: Semiconductor structure and method for manufacturing the same
- Patent Title (中): 半导体结构及其制造方法
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Application No.: US13256866Application Date: 2011-02-25
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Publication No.: US08766371B2Publication Date: 2014-07-01
- Inventor: Huilong Zhu , Qingqing Liang , Zhijiong Luo , Haizhou Yin
- Applicant: Huilong Zhu , Qingqing Liang , Zhijiong Luo , Haizhou Yin
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Troutman Sanders LLP
- Priority: CN201010215163 20100622
- International Application: PCT/CN2011/071318 WO 20110225
- International Announcement: WO2011/160463 WO 20111229
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
There is provided a semiconductor structure and a method for manufacturing the same. The semiconductor structure according to the present invention comprises: a semiconductor substrate; a channel region formed on the semiconductor substrate; a gate stack formed on the channel region; and source/drain regions formed on both sides of the channel region and embedded in the semiconductor substrate. The gate stack comprises: a gate dielectric layer formed on the channel region; and a conductive layer positioned on the gate dielectric layer. For an nMOSFET, the conductive layer has a compressive stress to apply a tensile stress to the channel region; and for a pMOSFET, the conductive layer has a tensile stress to apply a compressive stress to the channel region.
Public/Granted literature
- US20120104508A1 SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-05-03
Information query
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