Invention Grant
- Patent Title: Field effect transistor devices with dopant free channels and back gates
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Application No.: US13684695Application Date: 2012-11-26
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Publication No.: US08766377B2Publication Date: 2014-07-01
- Inventor: Kangguo Cheng , Bruce B. Doris , Ali Khakifirooz , Ghavam G. Shahidi
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
A method of forming a back gate transistor device includes forming an open isolation trench in a substrate; forming sidewall spacers in the open isolation trench; and using the open isolation trench to perform a doping operation so as to define a doped well region below a bottom surface of the isolation trench that serves as a back gate conductor, wherein the sidewall spacers prevent contamination of a channel region of the back gate transistor device by dopants.
Public/Granted literature
- US20140131790A1 FIELD EFFECT TRANSISTOR DEVICES WITH DOPANT FREE CHANNELS AND BACK GATES Public/Granted day:2014-05-15
Information query
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