Invention Grant
- Patent Title: Semiconductor memory device
- Patent Title (中): 半导体存储器件
-
Application No.: US13599053Application Date: 2012-08-30
-
Publication No.: US08766446B2Publication Date: 2014-07-01
- Inventor: Nobuhito Kuge , Naoki Yasuda , Yoshiaki Fukuzumi , Tomoko Fujiwara
- Applicant: Nobuhito Kuge , Naoki Yasuda , Yoshiaki Fukuzumi , Tomoko Fujiwara
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2012-046811 20120302
- Main IPC: H01L23/495
- IPC: H01L23/495 ; H01L21/3205

Abstract:
A semiconductor memory device comprising a stacked unit, a semiconductor pillar, a charge storage layer, and a non-insulating film. The stacked unit includes first conductive layers and first insulating layers which are stacked alternately. The semiconductor pillar passes through the stacked body and the semiconductor pillar has a tubular structure. The charge storage layer is provided between the semiconductor pillar and each of the first conductive layers. The non-insulating film is provided inside the tubular structure and has a non-insulating member. The first effective impurity concentration of the non-insulating film is lower than a second effective impurity concentration of the semiconductor pillar.
Public/Granted literature
- US20130228928A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2013-09-05
Information query
IPC分类: