Invention Grant
US08766745B1 Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
有权
具有超薄导电外电极的基于石英的盘式谐振器陀螺仪及其制造方法
- Patent Title: Quartz-based disk resonator gyro with ultra-thin conductive outer electrodes and method of making same
- Patent Title (中): 具有超薄导电外电极的基于石英的盘式谐振器陀螺仪及其制造方法
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Application No.: US12488784Application Date: 2009-06-22
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Publication No.: US08766745B1Publication Date: 2014-07-01
- Inventor: Randall L. Kubena , David T. Chang , Robert L. Larson
- Applicant: Randall L. Kubena , David T. Chang , Robert L. Larson
- Applicant Address: US CA Malibu US IL Chicago
- Assignee: HRL Laboratories, LLC,The Boeing Company
- Current Assignee: HRL Laboratories, LLC,The Boeing Company
- Current Assignee Address: US CA Malibu US IL Chicago
- Agency: Ladas & Parry
- Main IPC: H03H9/02
- IPC: H03H9/02 ; G01C19/00 ; H03H9/24
Abstract:
A disk resonator gyroscope includes a quartz base, a quartz resonator disk having a central pillar connected to the base, the quartz resonator disk having a surface facing the base and having plurality of circumferential slots in the surface of the quartz resonator disk around the central pillar, and an electrode comprised of quartz and connected to the base outside of an outer edge of the resonator disk.
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