Invention Grant
- Patent Title: Microlithographic exposure method as well as a projection exposure system for carrying out the method
- Patent Title (中): 微光刻曝光方法以及用于实施该方法的投影曝光系统
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Application No.: US12946380Application Date: 2010-11-15
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Publication No.: US08767181B2Publication Date: 2014-07-01
- Inventor: Toralf Gruner , Daniel Kraehmer , Michael Totzeck , Johannes Wangler , Markus Brotsack , Nils Dieckmann , Aksel Goehnermeier , Markus Schwab , Damian Fiolka , Markus Zenzinger
- Applicant: Toralf Gruner , Daniel Kraehmer , Michael Totzeck , Johannes Wangler , Markus Brotsack , Nils Dieckmann , Aksel Goehnermeier , Markus Schwab , Damian Fiolka , Markus Zenzinger
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan LLC
- Priority: DE10346203 20030926
- Main IPC: G03B27/72
- IPC: G03B27/72 ; G03B27/54 ; G03F7/20

Abstract:
In an exposure method for exposing a substrate which is arranged in the area of an image plane of a projection objective as well as in a projection exposure system for performing that method, output radiation directed at the substrate and having an output polarization state is produced. Through variable adjustment of the output polarization state with the aid of at least one polarization manipulation device, the output polarization state can be formed to approach a nominal output polarization state. The polarization manipulation can be performed in a control loop on the basis of polarization-optical measuring data.
Public/Granted literature
- US20110069296A1 MICROLITHOGRAPHIC EXPOSURE METHOD AS WELL AS A PROJECTION EXPOSURE SYSTEM FOR CARRYING OUT THE METHOD Public/Granted day:2011-03-24
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