Drive-control of a movable body along a two-dimensional plane includes a process in which on switching from servo control of position in directions of three degrees of freedom of the movable body within a plane parallel to the two-dimensional plane using a first detection device to servo control using an encoder system, a detection device that detects positional information of the movable body in a direction perpendicular to the two-dimensional plane and tilt direction around at least one axis with respect to the two-dimensional plane switches from a second detection device when the movable body is in a suspended state, to a third detection device that has a plurality of detection positions placed in at least a part of an operating area of the movable body, and detects positional information in the perpendicular direction when the movable body is positioned at any of the detection positions.