Invention Grant
- Patent Title: Plasmonic in-cell polarizer
- Patent Title (中): 等离子体在室内偏光镜
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Application No.: US13558396Application Date: 2012-07-26
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Publication No.: US08767282B2Publication Date: 2014-07-01
- Inventor: Akinori Hashimura , Douglas J. Tweet , Apostolos T. Voutsas
- Applicant: Akinori Hashimura , Douglas J. Tweet , Apostolos T. Voutsas
- Applicant Address: US WA Camas
- Assignee: Sharp Laboratories of America, Inc.
- Current Assignee: Sharp Laboratories of America, Inc.
- Current Assignee Address: US WA Camas
- Agency: Law Office of Gerald Maliszewski
- Agent Gerald Maliszewski
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B5/30 ; G02F1/1335

Abstract:
A plasmonic polarizer and a method for fabricating the plasmonic polarizer are provided. The method deposits alternating layers of non-metallic film and metal, forming a stack. A hard mask is formed overlying the stack. The hard mask comprises structures having dimensions and periods between adjacent structures less than a first length, where the first length is equal to (a first wavelength of light/2). The stack is etched through openings in the hard mask to form pillar stacks of alternating non-metallic and metal layers having the dimensions of the hard mask structures. Then, the hard mask structures are removed. In one aspect, subsequent to removing the hard mask structures, the spaces between the pillar stacks are filled with a dielectric material.
Public/Granted literature
- US20120287362A1 Plasmonic In-Cell Polarizer Public/Granted day:2012-11-15
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