Invention Grant
- Patent Title: Semiconductor memory device
- Patent Title (中): 半导体存储器件
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Application No.: US13418651Application Date: 2012-03-13
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Publication No.: US08767452B2Publication Date: 2014-07-01
- Inventor: Masaru Kito , Tomoko Fujiwara , Hideaki Aochi
- Applicant: Masaru Kito , Tomoko Fujiwara , Hideaki Aochi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-191643 20110902
- Main IPC: G11C11/14
- IPC: G11C11/14 ; G11C11/00

Abstract:
According to one embodiment, a semiconductor memory device includes a stacked body, a semiconductor pillar, a charge storage layer, a tunneling layer, a dividing trench and a first heating unit. The stacked body includes a plurality of first insulating films stacked alternately with a plurality of electrode films. The semiconductor pillar pierces the stacked body. The charge storage layer is provided between the electrode films and the semiconductor pillar. The tunneling layer is provided between the charge storage layer and the semiconductor pillar. The dividing trench is provided between the semiconductor pillars in one direction orthogonal to a stacking direction of the stacked body to divide the electrode films. The first heating unit is provided in an interior of the dividing trench.
Public/Granted literature
- US20130058163A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2013-03-07
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