Invention Grant
US08768643B2 Method and apparatus for parallel testing of semiconductor devices
有权
用于半导体器件并行测试的方法和装置
- Patent Title: Method and apparatus for parallel testing of semiconductor devices
- Patent Title (中): 用于半导体器件并行测试的方法和装置
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Application No.: US13104742Application Date: 2011-05-10
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Publication No.: US08768643B2Publication Date: 2014-07-01
- Inventor: Yoram Schwarz , Ryan Clarke
- Applicant: Yoram Schwarz , Ryan Clarke
- Applicant Address: US CA San Jose
- Assignee: Intermolecular, Inc.
- Current Assignee: Intermolecular, Inc.
- Current Assignee Address: US CA San Jose
- Main IPC: G01R27/28
- IPC: G01R27/28 ; G01R31/00 ; G01R31/14 ; G01L15/00
Abstract:
Method and apparatus for parallel testing of multiple regions on a substrate used in high performance combinatorial development of new materials and processes are described. The apparatus comprises dedicated hardware for each probe assembly with multiple PC controllers networked using a master/slave configuration.
Public/Granted literature
- US20120290245A1 METHOD AND APPARATUS FOR PARALLEL TESTING OF SEMICONDUCTOR DEVICES Public/Granted day:2012-11-15
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