Invention Grant
- Patent Title: Atomic force microscope system using selective active damping
- Patent Title (中): 原子力显微镜系统采用选择性主动阻尼
-
Application No.: US13675251Application Date: 2012-11-13
-
Publication No.: US08769710B2Publication Date: 2014-07-01
- Inventor: Christopher Ryan Moon , Richard K. Workman
- Applicant: Agilent Technologies, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q10/00 ; G01Q10/04 ; G01Q20/00 ; G01Q20/02 ; G01Q60/24
Abstract:
An atomic force microscope (AFM) system comprises a cantilever arm attached to a probe tip. The system controls a height of the cantilever arm to press the probe tip against a sample and then separate the probe tip from the sample, to detect a disturbance of the cantilever arm after the separation of the probe tip from the surface, and to engage active damping of the cantilever arm to suppress the disturbance.
Public/Granted literature
- US20140137300A1 ATOMIC FORCE MICROSCOPE SYSTEM USING SELECTIVE ACTIVE DAMPING Public/Granted day:2014-05-15
Information query
