Invention Grant
- Patent Title: Ultrasonic transmitter and receiver with compliant membrane
- Patent Title (中): 超声波发射器和接收器兼容膜
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Application No.: US13089513Application Date: 2011-04-19
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Publication No.: US08770030B2Publication Date: 2014-07-08
- Inventor: James D. Huffman , Gary A. Kneezel
- Applicant: James D. Huffman , Gary A. Kneezel
- Applicant Address: US NY Rochester
- Assignee: Eastman Kodak Company
- Current Assignee: Eastman Kodak Company
- Current Assignee Address: US NY Rochester
- Agent William R. Zimmerli
- Main IPC: G01N29/04
- IPC: G01N29/04

Abstract:
An ultrasonic transmitter and receiver includes a MEMS composite transducer. The MEMS composite transducer includes a substrate. Portions of the substrate define an outer boundary of a cavity. A first MEMS transducing member includes a first size. A first portion of the first MEMS transducing member is anchored to the substrate. A second portion of the first MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A second MEMS transducing member includes a second size that is smaller than the first size of the first MEMS transducing member. A first portion of the second MEMS transducing member is anchored to the substrate. A second portion of the second MEMS transducing member extends over at least a portion of the cavity and is free to move relative to the cavity. A compliant membrane is positioned in contact with the first and second MEMS transducing members. A first portion of the compliant membrane covers the first and second MEMS transducing members. A second portion of the compliant membrane is anchored to the substrate.
Public/Granted literature
- US20120269031A1 ULTRASONIC TRANSMITTER AND RECEIVER WITH COMPLIANT MEMBRANE Public/Granted day:2012-10-25
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