Invention Grant
- Patent Title: Relative pressure sensor
- Patent Title (中): 相对压力传感器
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Application No.: US13389855Application Date: 2010-07-21
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Publication No.: US08770032B2Publication Date: 2014-07-08
- Inventor: Olaf Krusemark , Norbert Gill
- Applicant: Olaf Krusemark , Norbert Gill
- Applicant Address: DE Maulburg
- Assignee: Endress + Hauser GmbH +Co. KG
- Current Assignee: Endress + Hauser GmbH +Co. KG
- Current Assignee Address: DE Maulburg
- Agency: Bacon & Thomas, PLLC
- Priority: DE102009028488 20090812
- International Application: PCT/EP2010/060516 WO 20100721
- International Announcement: WO2011/018311 WO 20110217
- Main IPC: G01L7/00
- IPC: G01L7/00 ; G01L19/06 ; G01L19/14

Abstract:
A relative pressure sensor includes: a pressure measuring transducer having a measuring membrane of a semiconductor chip and a platform, wherein, between both of these, a reference pressure chamber is formed; a support body, connected with the platform by means of a pressure-bearing adhesion, wherein a reference pressure path extends through the two former elements into the reference pressure chamber; and a sensor outer body, in which a transducer chamber with a first opening and a second opening is formed. The pressure measuring transducer is brought into the transducer chamber through the first opening, and is held therein by means of the support body. The support body pressure-tightly seals the first opening, and a side of the measuring membrane facing away from the reference pressure chamber is contactable with the media pressure through the second opening. The reference pressure path has a gas-filled, sealed section, which extends from the reference pressure chamber at least through the pressure bearing adhesion, and wherein the sealed section is gas-tightly sealed by means of a flexible, metallized plastic foil.
Public/Granted literature
- US20120137784A1 Relative Pressure Sensor Public/Granted day:2012-06-07
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