Invention Grant
- Patent Title: Electrode for generating plasma and plasma generator
- Patent Title (中): 用于产生等离子体和等离子体发生器的电极
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Application No.: US12560705Application Date: 2009-09-16
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Publication No.: US08770142B2Publication Date: 2014-07-08
- Inventor: Sang In Lee
- Applicant: Sang In Lee
- Applicant Address: US CA Fremont
- Assignee: Veeco ALD Inc.
- Current Assignee: Veeco ALD Inc.
- Current Assignee Address: US CA Fremont
- Agency: Fenwick & West LLP
- Priority: KR10-2008-0090969 20080917; KR10-2009-0086314 20090914
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/306 ; C23F1/00 ; H01J7/24 ; H05B31/26 ; H01J37/32 ; C23C16/455 ; C23C16/50

Abstract:
A plasma generator may include a first electrode extending in one direction, and a second electrode spaced apart from the first electrode. Facing surfaces of the first electrode and the second electrode may have spiral shapes along the one direction. A cross-section of the first electrode and a cross-section of the second electrode, which are perpendicular to the one direction, may have at least partially concentric shapes. An electrode for generating plasma may include a platform extending in one direction, and at least one protruding thread spirally formed on a surface of the platform along the one direction.
Public/Granted literature
- US20100064971A1 Electrode for Generating Plasma and Plasma Generator Public/Granted day:2010-03-18
Information query
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