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US08770142B2 Electrode for generating plasma and plasma generator 失效
用于产生等离子体和等离子体发生器的电极

Electrode for generating plasma and plasma generator
Abstract:
A plasma generator may include a first electrode extending in one direction, and a second electrode spaced apart from the first electrode. Facing surfaces of the first electrode and the second electrode may have spiral shapes along the one direction. A cross-section of the first electrode and a cross-section of the second electrode, which are perpendicular to the one direction, may have at least partially concentric shapes. An electrode for generating plasma may include a platform extending in one direction, and at least one protruding thread spirally formed on a surface of the platform along the one direction.
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