Invention Grant
US08770725B2 Method of manufacturing electromechanical transducer element, electromechanical transducer element, discharging head, and inkjet recording device 有权
制造机电换能器元件,机电换能器元件,排放头和喷墨记录装置的方法

Method of manufacturing electromechanical transducer element, electromechanical transducer element, discharging head, and inkjet recording device
Abstract:
Disclosed is a method of manufacturing an electromechanical transducer element including a first process of hydrophobizing a first area of an electrode by forming a self-assembled monolayer film; a second process of applying a sol-gel solution onto a predetermined second area of the electrode so as to produce a complex oxide; a third process of producing the complex oxide by calcining the electrode; a fourth process of acid-washing the electrode on which the complex oxide has been produced; a fifth process of hydrophobizing the first area of the acid-washed electrode by forming the self-assembled monolayer film; a sixth process of applying the sol-gel solution onto the predetermined second area; and a seventh process of producing the complex oxide by calcining the electrode.
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