Invention Grant
- Patent Title: Imprint apparatus and article manufacturing method
- Patent Title (中): 印刷装置及制品制造方法
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Application No.: US13004469Application Date: 2011-01-11
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Publication No.: US08770964B2Publication Date: 2014-07-08
- Inventor: Eigo Kawakami
- Applicant: Eigo Kawakami
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2010-004445 20100112
- Main IPC: B29C59/00
- IPC: B29C59/00

Abstract:
An imprint apparatus includes: a support member which supports the mold; a substrate stage which supports the substrate; a detector which detects a force applied to the mold; a mechanism which forms a space for removing the mold supported by the support member, between the support member and the substrate stage, and a controller. The controller determines a release force required to detach the mold from the cured resin, based on a detection result from the detector, compares the determined release force with a first threshold value, and causes the mechanism to form the space if the determined release force is larger than the first threshold value.
Public/Granted literature
- US20110169181A1 IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2011-07-14
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