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US08771442B2 Cyclic olefin compositions for temporary wafer bonding 有权
用于临时晶圆键合的环状烯烃组合物

Cyclic olefin compositions for temporary wafer bonding
Abstract:
New compositions and methods of using those compositions as bonding compositions are provided. The compositions comprise a cycloolefin copolymer dispersed or dissolved in a solvent system, and can be used to bond an active wafer to a carrier wafer or substrate to assist in protecting the active wafer and its active sites during subsequent processing and handling. The compositions form bonding layers that are chemically and thermally resistant, but that can also be softened or dissolved to allow the wafers to slide or be pulled apart at the appropriate stage in the fabrication process.
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