Invention Grant
- Patent Title: Cyclic olefin compositions for temporary wafer bonding
- Patent Title (中): 用于临时晶圆键合的环状烯烃组合物
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Application No.: US13548674Application Date: 2012-07-13
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Publication No.: US08771442B2Publication Date: 2014-07-08
- Inventor: Wenbin Hong , Dongshun Bai , Tony D. Flaim , Rama Puligadda
- Applicant: Wenbin Hong , Dongshun Bai , Tony D. Flaim , Rama Puligadda
- Applicant Address: US MO Rolla
- Assignee: Brewer Science Inc.
- Current Assignee: Brewer Science Inc.
- Current Assignee Address: US MO Rolla
- Agency: Kusner & Jaffe
- Main IPC: C08L65/00
- IPC: C08L65/00 ; C09J123/00 ; B32B37/00 ; C08G77/14 ; C08G73/10

Abstract:
New compositions and methods of using those compositions as bonding compositions are provided. The compositions comprise a cycloolefin copolymer dispersed or dissolved in a solvent system, and can be used to bond an active wafer to a carrier wafer or substrate to assist in protecting the active wafer and its active sites during subsequent processing and handling. The compositions form bonding layers that are chemically and thermally resistant, but that can also be softened or dissolved to allow the wafers to slide or be pulled apart at the appropriate stage in the fabrication process.
Public/Granted literature
- US20120291938A1 CYCLIC OLEFIN COMPOSITIONS FOR TEMPORARY WAFER BONDING Public/Granted day:2012-11-22
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