Invention Grant
- Patent Title: Process for the manufacture of doped semiconductor single crystals, and III-V semiconductor single crystal
- Patent Title (中): 用于制造掺杂半导体单晶和III-V半导体单晶的工艺
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Application No.: US12034345Application Date: 2008-02-20
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Publication No.: US08771560B2Publication Date: 2014-07-08
- Inventor: Ulrich Kretzer , Stefan Eichler , Thomas Bünger
- Applicant: Ulrich Kretzer , Stefan Eichler , Thomas Bünger
- Applicant Address: DE Freiberg
- Assignee: Freiberger Compound Materials GmbH
- Current Assignee: Freiberger Compound Materials GmbH
- Current Assignee Address: DE Freiberg
- Agency: Foley & Lardner LLP
- Priority: DE102005030853 20050701
- Main IPC: H01B1/02
- IPC: H01B1/02 ; H01B1/08 ; H01B1/06 ; C30B9/00 ; C30B11/00 ; C30B17/00 ; C30B21/02 ; C30B28/06

Abstract:
In a process for manufacturing doped semiconductor single crystal comprises solidifying in a crucible, the amount of dopant is added into the semiconductor melt after the beginning of the crystal growth onto the seed crystal, or after at least partial solidification of the semiconductor single crystal in a conical or tapered portion of the crucible. Dopant may be partially added in advance into the crucible, with the remainder added into the semiconductor melt as described. Type III-V semiconductor single crystals or wafers having a diameter of at least about 100 mm, can be prepared having an electrical conductivity of at least about 250 Siemens/cm, and/or an electric resistivity of at most about 4×10−3 Ωcm, and/or a significantly improved ratio of hall mobility to charge carrier concentration.
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