Invention Grant
US08771807B2 Organoaminosilane precursors and methods for making and using same
有权
有机氨基硅烷前体及其制备和使用方法
- Patent Title: Organoaminosilane precursors and methods for making and using same
- Patent Title (中): 有机氨基硅烷前体及其制备和使用方法
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Application No.: US13474076Application Date: 2012-05-17
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Publication No.: US08771807B2Publication Date: 2014-07-08
- Inventor: Manchao Xiao , Xinjian Lei , Bing Han , Mark Leonard O'Neill , Ronald Martin Pearlstein , Richard Ho , Haripin Chandra , Agnes Derecskei-Kovacs
- Applicant: Manchao Xiao , Xinjian Lei , Bing Han , Mark Leonard O'Neill , Ronald Martin Pearlstein , Richard Ho , Haripin Chandra , Agnes Derecskei-Kovacs
- Applicant Address: US PA Allentown
- Assignee: Air Products and Chemicals, Inc.
- Current Assignee: Air Products and Chemicals, Inc.
- Current Assignee Address: US PA Allentown
- Agent Rosaleen P. Morris-Oskanian
- Main IPC: C07F7/02
- IPC: C07F7/02
Abstract:
Described herein are organoaminosilane precursors which can be used to deposit silicon containing films which contain silicon and methods for making these precursors. Also disclosed herein are deposition methods for making silicon-containing films or silicon containing films using the organoaminosilane precursors described herein. Also disclosed herein are the vessels that comprise the organoaminosilane precursors or a composition thereof that can be used, for example, to deliver the precursor to a reactor in order to deposit a silicon-containing film.
Public/Granted literature
- US20130129940A1 ORGANOAMINOSILANE PRECURSORS AND METHODS FOR MAKING AND USING SAME Public/Granted day:2013-05-23
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