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US08771822B2 Methods for the growth of three-dimensional nanorod networks 有权
三维纳米棒网络生长方法

Methods for the growth of three-dimensional nanorod networks
Abstract:
Methods for growing a three-dimensional nanorod network in three-dimensional growth spaces, including highly confined spaces, are provided. The methods are derived from atomic layer deposition (ALD) processes, but use higher temperatures and extended pulsing and/or purging times. Through these methods, networks of nanorods can be grown uniformly along the entire inner surfaces of confined growth spaces.
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