Invention Grant
US08771922B2 Copolymer for resist comprising novel acryl based monomer and resin composition for resist comprising the same
失效
用于抗蚀剂的共聚物,其包含新颖的基于丙烯酸的单体和包含其的抗蚀剂的树脂组合物
- Patent Title: Copolymer for resist comprising novel acryl based monomer and resin composition for resist comprising the same
- Patent Title (中): 用于抗蚀剂的共聚物,其包含新颖的基于丙烯酸的单体和包含其的抗蚀剂的树脂组合物
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Application No.: US13432218Application Date: 2012-03-28
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Publication No.: US08771922B2Publication Date: 2014-07-08
- Inventor: Jin Bong Shin , Jin Ho Kim , Dae Hyeon Shin , Seung Jae Lee
- Applicant: Jin Bong Shin , Jin Ho Kim , Dae Hyeon Shin , Seung Jae Lee
- Applicant Address: KR Seoul
- Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee: Korea Kumho Petrochemical Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Ladas & Parry LLP
- Priority: KR10-2011-0028951 20110330
- Main IPC: G03F7/00
- IPC: G03F7/00 ; C08F236/20 ; C08F118/02

Abstract:
A resist resin composition includes 100 parts by weight of a copolymer represented by Formula 3 below; 0.5 to 1.5 parts by weight of a photoacid generator and 700 to 1,500 parts by weight of a solvent: wherein R1, R2, and R3 are each independently a C1-30 alkyl group, a C3-30 cycloalkyl group, an ether group, an ester group, a carbonyl group, an acetal group, an epoxy group, a nitrile group, or an aldehyde group, R4, R5, and R6 are each independently hydrogen or a methyl group, and l, m, n, and o each independently refer to the number of repeating units in a main backbone and satisfy the conditions: l+m+n+o=1, 0≦l/(l+m+n+o)
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